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Article

Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

1
Department of Electronic and Communication Engineering, North China Electric Power University, Baoding 071003, China
2
Hebei Key Laboratory of Power Internet of Things Technology, North China Electric Power University, Baoding 071003, China
3
Baoding Key Laboratory of Optical Fiber Sensing and Optical Communication Technology, North China Electric Power University, Baoding 071003, China
*
Author to whom correspondence should be addressed.
Photonics 2023, 10(1), 22; https://doi.org/10.3390/photonics10010022
Submission received: 28 November 2022 / Revised: 18 December 2022 / Accepted: 22 December 2022 / Published: 25 December 2022
(This article belongs to the Special Issue Fiber Optics and Its Applications)

Abstract

The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method by converting the wavelength is proposed. The influence of target temperature and data point selection on the compensation effect is studied, and the effectiveness of the method is verified by the temperature compensation of sensors before and after aging. When the converted target temperature is 25 °C, the pressure measurement accuracy of the sensor is improved from 1.98% F.S. to 0.38% F.S. within the range of 5–45 and 0–4 MPa. The method proposed in this paper can not only improve the accuracy but also make the regular calibration more operable.
Keywords: conversion method; temperature compensation; optical fiber MEMS F-P pressure sensor; sensor calibration conversion method; temperature compensation; optical fiber MEMS F-P pressure sensor; sensor calibration

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MDPI and ACS Style

Yao, G.; Li, Y.; Shang, Q.; Fan, H. Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method. Photonics 2023, 10, 22. https://doi.org/10.3390/photonics10010022

AMA Style

Yao G, Li Y, Shang Q, Fan H. Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method. Photonics. 2023; 10(1):22. https://doi.org/10.3390/photonics10010022

Chicago/Turabian Style

Yao, Guozhen, Yongqian Li, Qiufeng Shang, and Hanbai Fan. 2023. "Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method" Photonics 10, no. 1: 22. https://doi.org/10.3390/photonics10010022

APA Style

Yao, G., Li, Y., Shang, Q., & Fan, H. (2023). Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method. Photonics, 10(1), 22. https://doi.org/10.3390/photonics10010022

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