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Journal: ProcessesVolume: 8Number: 666
Article: Deposition of Boron-Doped Thin CVD Diamond Films from Methane-Triethyl Borate-Hydrogen Gas Mixture
- Authors:
- Nikolay Ivanovich Polushin1,
- Alexander Ivanovich Laptev1 and
- Boris Vladimirovich Spitsyn2
- et al.
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