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Article

A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

1
Department of Chemistry, National Taiwan Normal University, Taipei 11677, Taiwan
2
Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan
3
Department of Chemical and Materials Engineering, Chung Cheng Institute of Technology, National Defense University, Taoyuan 33509,Taiwan
4
Undergraduate Degree Program of System Engineering and Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editors: Stéphane Le Calvé and Sulaiman Khan
Chemosensors 2021, 9(5), 104; https://doi.org/10.3390/chemosensors9050104
Received: 15 March 2021 / Revised: 30 April 2021 / Accepted: 3 May 2021 / Published: 7 May 2021
(This article belongs to the Special Issue Advances in Analytical Systems for Gaseous Mixture)
This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of µ-pillars measuring 100 µm in diameter and 250 µm in height were fabricated inside a microfluidic channel to increase the attaching surface for the CMSM. The surface area of the CMSM was measured as high as 899 m2/g. A GC peak amplification factor >2 × 104 was demonstrated with gaseous ethyl acetate. Up to 1.4 L of gaseous ethanol at the 100 ppb level could be concentrated without exceeding the capacity of this microchip device. Sharp desorption chromatographic peaks (<3.5 s) were obtained while using this device directly as a GC injector. Less volatile compounds such as gaseous toluene, m-xylene, and mesitylene appeared to be adsorbed strongly on CMSM, showing a memory effect. Sampling parameters such as sample volatilities, sampling capacities, and compound residual issues were empirically determined and discussed. View Full-Text
Keywords: preconcentration; MEMS; VOCs; carbon molecular sieve membrane preconcentration; MEMS; VOCs; carbon molecular sieve membrane
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MDPI and ACS Style

Kuo, H.-Y.; Cheng, W.-R.; Wu, T.-H.; Sheen, H.-J.; Wang, C.-C.; Lu, C.-J. A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling. Chemosensors 2021, 9, 104. https://doi.org/10.3390/chemosensors9050104

AMA Style

Kuo H-Y, Cheng W-R, Wu T-H, Sheen H-J, Wang C-C, Lu C-J. A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling. Chemosensors. 2021; 9(5):104. https://doi.org/10.3390/chemosensors9050104

Chicago/Turabian Style

Kuo, Hung-Yen, Wei-Riu Cheng, Tzu-Heng Wu, Horn-Jiunn Sheen, Chih-Chia Wang, and Chia-Jung Lu. 2021. "A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling" Chemosensors 9, no. 5: 104. https://doi.org/10.3390/chemosensors9050104

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