A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

Kuo, Hung-Yen; Cheng, Wei-Riu; Wu, Tzu-Heng; Sheen, Horn-Jiunn; Wang, Chih-Chia; Lu, Chia-Jung

doi:10.3390/chemosensors9050104

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A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

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Department of Chemistry, National Taiwan Normal University, Taipei 11677, Taiwan

Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan

Department of Chemical and Materials Engineering, Chung Cheng Institute of Technology, National Defense University, Taoyuan 33509,Taiwan

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Undergraduate Degree Program of System Engineering and Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan

Author to whom correspondence should be addressed.

Academic Editors: Stéphane Le Calvé and Sulaiman Khan

Chemosensors 2021, 9(5), 104; https://doi.org/10.3390/chemosensors9050104

Received: 15 March 2021 / Revised: 30 April 2021 / Accepted: 3 May 2021 / Published: 7 May 2021

(This article belongs to the Special Issue Advances in Analytical Systems for Gaseous Mixture)

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Abstract

This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of µ-pillars measuring 100 µm in diameter and 250 µm in height were fabricated inside a microfluidic channel to increase the attaching surface for the CMSM. The surface area of the CMSM was measured as high as 899 m²/g. A GC peak amplification factor >2 × 10⁴ was demonstrated with gaseous ethyl acetate. Up to 1.4 L of gaseous ethanol at the 100 ppb level could be concentrated without exceeding the capacity of this microchip device. Sharp desorption chromatographic peaks (<3.5 s) were obtained while using this device directly as a GC injector. Less volatile compounds such as gaseous toluene, m-xylene, and mesitylene appeared to be adsorbed strongly on CMSM, showing a memory effect. Sampling parameters such as sample volatilities, sampling capacities, and compound residual issues were empirically determined and discussed. View Full-Text

Keywords: preconcentration; MEMS; VOCs; carbon molecular sieve membrane

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MDPI and ACS Style

Kuo, H.-Y.; Cheng, W.-R.; Wu, T.-H.; Sheen, H.-J.; Wang, C.-C.; Lu, C.-J. A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling. Chemosensors 2021, 9, 104. https://doi.org/10.3390/chemosensors9050104

AMA Style

Kuo H-Y, Cheng W-R, Wu T-H, Sheen H-J, Wang C-C, Lu C-J. A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling. Chemosensors. 2021; 9(5):104. https://doi.org/10.3390/chemosensors9050104

Chicago/Turabian Style

Kuo, Hung-Yen, Wei-Riu Cheng, Tzu-Heng Wu, Horn-Jiunn Sheen, Chih-Chia Wang, and Chia-Jung Lu. 2021. "A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling" Chemosensors 9, no. 5: 104. https://doi.org/10.3390/chemosensors9050104

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A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

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