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Chemosensors 2019, 7(1), 7; https://doi.org/10.3390/chemosensors7010007

Deposition Time and Annealing Effects of ZnO Seed Layer on Enhancing Vertical Alignment of Piezoelectric ZnO Nanowires

1
GREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 16 rue Pierre et Marie Curie, BP 7155, 37071 TOURS CEDEX 2, France
2
GREMAN UMR-CNRS, Université de Tours, INSA Centre Val de Loire, 3 rue de la Chocolaterie, CS 23410, 41034 BLOIS CEDEX, France
*
Author to whom correspondence should be addressed.
Received: 29 December 2018 / Revised: 6 February 2019 / Accepted: 11 February 2019 / Published: 13 February 2019
(This article belongs to the Special Issue Nanotechnology Efforts for Chemical Sensors)
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Abstract

Well aligned crystalline zinc oxide (ZnO) nanowires (NWs) on ZnO/Au/Ti/Si substrates were grown by so-called “hydrothermal synthesis”. ZnO seed layers with different thicknesses ranging from 5 to 100 nm, achieved by controlling the deposition time, were prepared by radio-frequency sputtering, followed by a post-annealing treatment in air at 400 °C. The effects of deposition time and annealing treatment of ZnO seed layers on the subsequent growth of ZnO NWs were investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), and scanning electron microscopy (SEM). The experimental results reveal that the quality and growth behaviors of ZnO NWs are strongly dependent on both the thickness and the heat treatment of the ZnO seed layers. This work is an optimization step of an easy, cost-effective, and industrially scalable process flow recently developed for the fabrication of a high performance, nanocomposite-based stretchable nanogenerator (SNG) on polydimethylsiloxane (PDMS) substrate. The morphological improvement of hydrothermally grown ZnO NWs may therefore lead to higher performance SNGs for the targeted application of mechanical energy harvesting, in order to supply flexible and wearable electronics. View Full-Text
Keywords: ZnO seed layer; NWs; hydrothermal synthesis; piezoelectric energy harvesters; stretchable nanogenerator; wearable electronics ZnO seed layer; NWs; hydrothermal synthesis; piezoelectric energy harvesters; stretchable nanogenerator; wearable electronics
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Slimani Tlemcani, T.; Justeau, C.; Nadaud, K.; Poulin-Vittrant, G.; Alquier, D. Deposition Time and Annealing Effects of ZnO Seed Layer on Enhancing Vertical Alignment of Piezoelectric ZnO Nanowires. Chemosensors 2019, 7, 7.

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