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Journal: J. Sens. Actuator Netw., 2025
Volume: 14
Number: 88

Article: Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits
Authors: by Seyedfakhreddin Nabavi, Michaël Ménard and Frederic Nabki
Link: https://www.mdpi.com/2224-2708/14/5/88

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