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Journal: J. Sens. Actuator Netw., 2025
Volume: 14
Number: 88
Article:
Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits
Authors:
by
Seyedfakhreddin Nabavi, Michaël Ménard and Frederic Nabki
Link:
https://www.mdpi.com/2224-2708/14/5/88
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