Fominsky, M.Y.; Filippenko, L.V.; Chekushkin, A.M.; Dmitriev, P.N.; Koshelets, V.P.
Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography. Electronics 2021, 10, 2944.
https://doi.org/10.3390/electronics10232944
AMA Style
Fominsky MY, Filippenko LV, Chekushkin AM, Dmitriev PN, Koshelets VP.
Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography. Electronics. 2021; 10(23):2944.
https://doi.org/10.3390/electronics10232944
Chicago/Turabian Style
Fominsky, Mikhail Yu., Lyudmila V. Filippenko, Artem M. Chekushkin, Pavel N. Dmitriev, and Valery P. Koshelets.
2021. "Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography" Electronics 10, no. 23: 2944.
https://doi.org/10.3390/electronics10232944
APA Style
Fominsky, M. Y., Filippenko, L. V., Chekushkin, A. M., Dmitriev, P. N., & Koshelets, V. P.
(2021). Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography. Electronics, 10(23), 2944.
https://doi.org/10.3390/electronics10232944