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Journal: J. Low Power Electron. Appl., 2025
Volume: 15
Number: 26

Article: Ultra-Thin Al2O3 Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors
Authors: by Shiwei Sun, Dinghao Ma, Boxi Ye, Guanshun Liu, Nanting Luo and Hao Huang
Link: https://www.mdpi.com/2079-9268/15/2/26

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