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Journal: J. Low Power Electron. Appl., 2025
Volume: 15
Number: 26
Article:
Ultra-Thin Al2O3 Grown by PEALD for Low-Power Molybdenum Disulfide Field-Effect Transistors
Authors:
by
Shiwei Sun, Dinghao Ma, Boxi Ye, Guanshun Liu, Nanting Luo and Hao Huang
Link:
https://www.mdpi.com/2079-9268/15/2/26
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