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Journal: Coatings, 2019
Volume: 9
Number: 341

Article: Growth of Ultrathin Al2O3 Films on n-InP Substrates as Insulating Layers by RF Magnetron Sputtering and Study on the Optical and Dielectric Properties
Authors: by Xiufeng Tang, Zhixin Li, Huizhen Liao and Jiong Zhang
Link: https://www.mdpi.com/2079-6412/9/5/341

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