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Journal: Coatings, 2019
Volume: 9
Number: 338

Article: Microstructure and Mechanical Property Investigation of TaSiN Thin Films Deposited by Reactive Magnetron Sputtering
Authors: by Anna Zaman, Yi Shen and Efstathios I. Meletis
Link: https://www.mdpi.com/2079-6412/9/5/338

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