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Journal: Coatings, 2018
Volume: 8
Number: 325
325
Article: Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition
Authors: by Ben Wang, Xiuhua Fu, Shigeng Song, Hin On Chu, Desmond Gibson, Cheng Li, Yongjing Shi and Zhentao Wu
Link: https://www.mdpi.com/2079-6412/8/9/325

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