In-Situ Heat Treatment Study on the Nanocrystalline Cr2O3 Film Using an Environmental Scanning Electron Microscope
Abstract
:1. Introduction
2. Experimental Details
2.1. Preparition of the Cr2O3 Film
2.2. Characterizations of the Cr2O3 Film
3. Results and Discussion
3.1. Percentage of Crack Area for the Heat-Treated Cr2O3 Film
3.2. Surface Morphologies
3.3. Fractured Cross-Section
3.4. XRD Analysis
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Parameters | Value |
---|---|
Base pressure (Pa) | 3.5 × 10−3 |
Working pressure (Pa) | 3.0 × 10−1 |
Deposition temperature (°C) | 300 |
Arc current (A) | 55 |
DC bias voltage (V) | −100 |
Ar:O2 gas flow ratio (sccm) | 40:20 |
Substrate rotation speed (rpm) | 25 |
Film thickness (μm) | ~3.5 |
Distance between the target and substrate (mm) | 350 |
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Wang, T.-G.; Dong, Y.; Liu, Y.; Iyengar, S.; Kim, K.H.; Yang, Z. In-Situ Heat Treatment Study on the Nanocrystalline Cr2O3 Film Using an Environmental Scanning Electron Microscope. Coatings 2017, 7, 225. https://doi.org/10.3390/coatings7120225
Wang T-G, Dong Y, Liu Y, Iyengar S, Kim KH, Yang Z. In-Situ Heat Treatment Study on the Nanocrystalline Cr2O3 Film Using an Environmental Scanning Electron Microscope. Coatings. 2017; 7(12):225. https://doi.org/10.3390/coatings7120225
Chicago/Turabian StyleWang, Tie-Gang, Yu Dong, Yanmei Liu, Srinivasan Iyengar, Kwang Ho Kim, and Zubing Yang. 2017. "In-Situ Heat Treatment Study on the Nanocrystalline Cr2O3 Film Using an Environmental Scanning Electron Microscope" Coatings 7, no. 12: 225. https://doi.org/10.3390/coatings7120225