Kengesbekov, A.; Rakhadilov, B.; Kussainov, A.; Serikbaikyzy, A.; Askhatov, A.; Aringozhina, Z.
Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties. Coatings 2025, 15, 1434.
https://doi.org/10.3390/coatings15121434
AMA Style
Kengesbekov A, Rakhadilov B, Kussainov A, Serikbaikyzy A, Askhatov A, Aringozhina Z.
Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties. Coatings. 2025; 15(12):1434.
https://doi.org/10.3390/coatings15121434
Chicago/Turabian Style
Kengesbekov, Aidar, Bauyrzhan Rakhadilov, Arystanbek Kussainov, Ainur Serikbaikyzy, Arnur Askhatov, and Zarina Aringozhina.
2025. "Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties" Coatings 15, no. 12: 1434.
https://doi.org/10.3390/coatings15121434
APA Style
Kengesbekov, A., Rakhadilov, B., Kussainov, A., Serikbaikyzy, A., Askhatov, A., & Aringozhina, Z.
(2025). Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties. Coatings, 15(12), 1434.
https://doi.org/10.3390/coatings15121434
