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Journal: Coatings, 2025
Volume: 15
Number: 1179

Article: Silicon Oxycarbide Coatings Produced by Remote Hydrogen Plasma CVD Process from Cyclic Tetramethylcyclotetrasiloxane
Authors: by Agnieszka Walkiewicz-Pietrzykowska, Krzysztof Jankowski, Romuald Brzozowski, Joanna Zakrzewska and Paweł Uznański
Link: https://www.mdpi.com/2079-6412/15/10/1179

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