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Journal: CoatingsVolume: 14Number: 1199
Article: Influence of Oxygen and Nitrogen Flow Ratios on the Microstructure Evolution in AlCrTaTiZr High-Entropy Oxynitride Films
- Authors:
- Yung-Chu Liang1,
- Ching-Yin Lee1 and
- Miao-I Lin1
- et al.
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