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Journal: Coatings, 2024
Volume: 14
Number: 258

Article: Silicon Dioxide Thin Films Deposited Using Oxide Targets: Results of Atomistic Simulation
Authors: by F. V. Grigoriev, V. B. Sulimov and A. V. Tikhonravov
Link: https://www.mdpi.com/2079-6412/14/3/258

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