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Journal: Coatings, 2024
Volume: 14
Number: 1412
Article:
Exploring the Relationship Between Electrical Characteristics and Changes in Chemical Composition and Structure of OSG Low-K Films Under Thermal Annealing
Authors:
by
Mungunsuvd Gerelt-Od, Tatiana G. Kolesnikova, Pavel A. Mokrushev, Alexey S. Vishnevskiy, Konstantin A. Vorotilov, Andrei A. Gismatulin, Vladimir A. Gritsenko and Mikhail R. Baklanov
Link:
https://www.mdpi.com/2079-6412/14/11/1412
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