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Journal: Coatings, 2023
Volume: 13
Number: 749
Article:
Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems
Authors:
by
Young Hyun Jo, Cheongbin Cheon, Heesung Park and Hae June Lee
Link:
https://www.mdpi.com/2079-6412/13/4/749
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