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Journal: Coatings, 2022
Volume: 12
Number: 140
Article:
Magnetron Sputter-Deposited β-Ga2O3 Films on c-Sapphire Substrate: Effect of Rapid Thermal Annealing Temperature on Crystalline Quality
Authors:
by
Sakal Pech, Sara Kim and Nam-Hoon Kim
Link:
https://www.mdpi.com/2079-6412/12/2/140
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