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Journal: Coatings, 2022
Volume: 12
Number: 1731
Article:
Effect of Deposition Temperature on the Surface, Structural, and Mechanical Properties of HfO2 Using Chemical Vapor Deposition (CVD)
Authors:
by
Mengran Bi, Junyu Zhu, Yuan Luo, Hongzhong Cai, Xuming Li, Xian Wang, Yan Wei, Xiao Wang, Changyi Hu, Jinquan Hu, Guixue Zhang, Xingqiang Wang and Xuxiang Zhang
Link:
https://www.mdpi.com/2079-6412/12/11/1731
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