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Journal: Coatings, 2021
Volume: 11
Number: 958
Article:
Silicon Carbide Wafer Machining by Using a Single Filament Plasma at Atmospheric Pressure
Authors:
by
Seungryul Yoo, Dong Chan Seok, Kang Il Lee, Yong Ho Jung and Yong Sup Choi
Link:
https://www.mdpi.com/2079-6412/11/8/958
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