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Journal: Coatings, 2021
Volume: 11
Number: 937
Article:
Study on the Electrical, Structural, Chemical and Optical Properties of PVD Ta(N) Films Deposited with Different N2 Flow Rates
Authors:
by
Yingying Hu, Md Rasadujjaman, Yanrong Wang, Jing Zhang, Jiang Yan and Mikhail R. Baklanov
Link:
https://www.mdpi.com/2079-6412/11/8/937
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