Podlucký, Ľ.; Vincze, A.; Kováčová, S.; Chlpík, J.; Kováč, J.; Uherek, F.
Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides. Coatings 2021, 11, 574.
https://doi.org/10.3390/coatings11050574
AMA Style
Podlucký Ľ, Vincze A, Kováčová S, Chlpík J, Kováč J, Uherek F.
Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides. Coatings. 2021; 11(5):574.
https://doi.org/10.3390/coatings11050574
Chicago/Turabian Style
Podlucký, Ľuboš, Andrej Vincze, Soňa Kováčová, Juraj Chlpík, Jaroslav Kováč, and František Uherek.
2021. "Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides" Coatings 11, no. 5: 574.
https://doi.org/10.3390/coatings11050574
APA Style
Podlucký, Ľ., Vincze, A., Kováčová, S., Chlpík, J., Kováč, J., & Uherek, F.
(2021). Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides. Coatings, 11(5), 574.
https://doi.org/10.3390/coatings11050574