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Journal: Coatings, 2021
Volume: 11
Number: 482

Article: Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
Authors: by Ramasis Goswami, Syed Qadri, Neeraj Nepal and Charles Eddy, Jr.
Link: https://www.mdpi.com/2079-6412/11/4/482

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