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Journal: Coatings, 2021
Volume: 11
Number: 1506

Article: Recent Advances in Hollow Cathode Technology for Plasma-Enhanced ALD—Plasma Surface Modifications for Aluminum and Stainless-Steel Cathodes
Authors: by Kenneth Scott Alexander Butcher, Vasil Georgiev and Dimka Georgieva
Link: https://www.mdpi.com/2079-6412/11/12/1506

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