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Journal: Coatings, 2021
Volume: 11
Number: 1450

Article: Study the Passivation Characteristics of Microwave Annealing Applied to APALD Deposited Al2O3 Thin Film
Authors: by Yu-Chun Huang, Ricky Wenkuei Chuang, Keh-Moh Lin and Tsung-Chieh Wu
Link: https://www.mdpi.com/2079-6412/11/12/1450

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