Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation
Abstract
:1. Introduction
2. Materials and Methods
2.1. Pulsed Laser Deposition and Materials
2.2. Characterization Techniques and Methods
3. Results and Discussion
3.1. Deposition of the Stacked Si/TiO2 Thin Films on (100) Si Wafer
3.2. AFM Characterization of TiO2 and Si Deposited Thin Films on (100) Si Wafer
The Roughness Versus the Length-Scale Related to the Target-Substrate Distance
3.3. Structural and Optical Characterization of TiO2 Thin Films
3.3.1. X-ray Diffraction and X-ray Reflectivity
3.3.2. Ellipsometry
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Deposition Parameters | AFM Analysis | ||||||||
---|---|---|---|---|---|---|---|---|---|
Sample | Deposited Thin Film | dTS (cm) | T (°C) | E (mJ) | RR (Hz) | Pi (Torr) | Pa (Torr) | σRMS (nm) | σa (nm) |
S0 | Si wafer | x | x | x | x | x | x | 0.21 ± 0.026 | 0.19 ± 0.023 |
S1 | TiO2 | 4 | 500 | 500 | 30 | 6.7 × 10−9 | 4.2 × 10−7 | 0.58 ± 0.098 | 0.46 ± 0.083 |
Si | 4 | 500 | 500 | 30 | 7.6 × 10−9 | 0.9 × 10−7 | 0.58 ± 0.077 | 0.44 ± 0.040 | |
S2 | TiO2 | 5 | 500 | 500 | 30 | 5.8 × 10−9 | 4.8 × 10−7 | 0.37 ± 0.063 | 0.29 ± 0.048 |
Si | 5 | 500 | 500 | 30 | 3.9 × 10−9 | 1.0 × 10−7 | 0.36 ± 0.024 | 0.29 ± 0.018 | |
S3 | TiO2 | 6 | 500 | 500 | 30 | 6.0 × 10−9 | 4.2 × 10−7 | 0.46 ± 0.024 | 0.35 ± 0.023 |
Si | 6 | 500 | 500 | 30 | 2.2 × 10−9 | 5.0 × 10−8 | 0.48 ± 0.090 | 0.32 ± 0.058 |
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Moise, C.C.; Pantazi, A.; Mihai, G.V.; Jderu, A.; Bercu, M.; Messina, A.A.; Enăchescu, M. Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation. Coatings 2021, 11, 1350. https://doi.org/10.3390/coatings11111350
Moise CC, Pantazi A, Mihai GV, Jderu A, Bercu M, Messina AA, Enăchescu M. Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation. Coatings. 2021; 11(11):1350. https://doi.org/10.3390/coatings11111350
Chicago/Turabian StyleMoise, Călin Constantin, Aida Pantazi, Geanina Valentina Mihai, Alin Jderu, Mircea Bercu, Angelo Alberto Messina, and Marius Enăchescu. 2021. "Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation" Coatings 11, no. 11: 1350. https://doi.org/10.3390/coatings11111350