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Journal: Coatings, 2021
Volume: 11
Number: 16

Article: Improving Transport Properties of GaN-Based HEMT on Si (111) by Controlling SiH4 Flow Rate of the SiNx Nano-Mask
Authors: by Jin-Ji Dai, Cheng-Wei Liu, Ssu-Kuan Wu, Sa-Hoang Huynh, Jhen-Gang Jiang, Sui-An Yen, Thi Thu Mai, Hua-Chiang Wen, Wu-Ching Chou, Chih-Wei Hu and Rong Xuan
Link: https://www.mdpi.com/2079-6412/11/1/16

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