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Journal: Coatings, 2020
Volume: 10
Number: 692
Article:
Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Authors:
by
Jong Hyeon Won, Seong Ho Han, Bo Keun Park, Taek-Mo Chung and Jeong Hwan Han
Link:
https://www.mdpi.com/2079-6412/10/7/692
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