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Journal: Coatings, 2020
Volume: 10
Number: 987

Article: Microstructure Evolution and Mechanical Behavior of Mo–Si–N Films
Authors: by Yu-Cheng Liu, Bing-Hao Liang, Chi-Ruei Huang and Fan-Bean Wu
Link: https://www.mdpi.com/2079-6412/10/10/987

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