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Journal: Nanomaterials, 2019
Volume: 9
Number: 848
Article:
Effect of Sputtering Temperature on Fluorocarbon Films: Surface Nanostructure and Fluorine/Carbon Ratio
Authors:
by
Qi Zhao, Feipeng Wang, Kaizheng Wang, Guibai Xie, Wanzhao Cui and Jian Li
Link:
https://www.mdpi.com/2079-4991/9/6/848
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