The guided mode resonance (GMR) effect is widely used in biosensing due to its advantages of narrow linewidth and high efficiency. However, the optimization of a figure of merit (FOM) has not been considered for most GMR sensors. Aimed at obtaining a higher FOM of GMR sensors, we proposed an effective design method for the optimization of FOM. Combining the analytical model and numerical simulations, the FOM of “grating–waveguide” GMR sensors for the wavelength and angular shift detection schemes were investigated systematically. In contrast with previously reported values, higher FOM values were obtained using this method. For the “waveguide–grating” GMR sensors, a linear relationship between the grating period and groove depth was obtained, which leads to excellent FOM values for both the angular and wavelength resonance. Such higher performance GMR sensors will pave the way to lower detection limits in biosensing.
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