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Open AccessArticle

NH3-Sensing Mechanism Using Surface Acoustic Wave Sensor with AlO(OH) Film

1
School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China
2
Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China
3
School of Electronics and Information, Qingdao University, Qingdao 266071, China
4
School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
5
School of Materials Science and Engineering, The University of New South Wales, 2052 Sydney, Australia
6
Faculty of Engineering and Environment, Northumbria University, Newcastle upon Tyne NE1 8ST, UK
*
Authors to whom correspondence should be addressed.
Nanomaterials 2019, 9(12), 1732; https://doi.org/10.3390/nano9121732
Received: 24 October 2019 / Revised: 24 November 2019 / Accepted: 1 December 2019 / Published: 4 December 2019
(This article belongs to the Special Issue Gas Sensors and Semiconductor Nanotechnology)
In this study, AlO(OH) (boehmite) film was deposited onto a surface acoustic wave (SAW) resonator using a combined sol-gel and spin-coating technology, and prepared and used as a sensitive layer for a high-performance ammonia sensor. The prepared AlO(OH) film has a mesoporous structure and a good affinity to NH3 (ammonia gas) molecules, and thus can selectively adsorb and react with NH3. When exposed to ammonia gases, the SAW sensor shows an initial positive response of the frequency shift, and then a slight decrease of the frequency responses. The sensing mechanism of the NH3 sensor is based on the competition between mass-loading and elastic-loading effects. The sensor operated at room temperature shows a positive response of 1540 Hz to 10 ppm NH3, with excellent sensitivity, selectivity and stability.
Keywords: AlO(OH) film; Surface acoustic wave; Ammonia sensor AlO(OH) film; Surface acoustic wave; Ammonia sensor
MDPI and ACS Style

Xu, X.; Zu, X.; Ao, D.; Yu, J.; Xiang, X.; Xie, W.; Tang, Y.; Li, S.; Fu, Y. NH3-Sensing Mechanism Using Surface Acoustic Wave Sensor with AlO(OH) Film. Nanomaterials 2019, 9, 1732.

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