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Open AccessArticle

Room-Temperature Pressure-Induced Optically-Actuated Fabry-Perot Nanomechanical Resonator with Multilayer Graphene Diaphragm in Air

1
School of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, China
2
Science and Technology on Metrology and Calibration Laboratory, Beijing 100095, China
3
Beijing Institute of Automatic Control Equipment, Beijing 100074, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2017, 7(11), 366; https://doi.org/10.3390/nano7110366
Received: 27 September 2017 / Revised: 19 October 2017 / Accepted: 30 October 2017 / Published: 4 November 2017
(This article belongs to the Special Issue Graphene and Nanotube Based Devices)
We demonstrated a miniature and in situ ~13-layer graphene nanomechanical resonator by utilizing a simple optical fiber Fabry-Perot (F-P) interferometric excitation and detection scheme. The graphene film was transferred onto the endface of a ferrule with a 125-μm inner diameter. In contrast to the pre-tension induced in membrane that increased quality (Q) factor to ~18.5 from ~3.23 at room temperature and normal pressure, the limited effects of air damping on resonance behaviors at 10−2 and 105 Pa were demonstrated by characterizing graphene F-P resonators with open and micro-air-gap cavities. Then in terms of optomechanical behaviors of the resonator with an air micro-cavity configuration using a polished ferrule substrate, measured resonance frequencies were increased to the range of 509–542 kHz from several kHz with a maximum Q factor of 16.6 despite the lower Knudsen number ranging from 0.0002 to 0.0006 in damping air over a relative pressure range of 0–199 kPa. However, there was the little dependence of Q on resonance frequency. Note that compared with the inferior F-P cavity length response to applied pressures due to interfacial air leakage, the developed F-P resonator exhibited a consistent fitted pressure sensitivity of 1.18 × 105 kHz3/kPa with a good linearity error of 5.16% in the tested range. These measurements shed light on the pre-stress-dominated pressure-sensitive mechanisms behind air damping in in situ F-P resonant sensors using graphene or other 2D nanomaterials. View Full-Text
Keywords: multilayer graphene diaphragm; Fabry-Perot nanomechanical resonator; air damping; pressure sensitivity; room temperature multilayer graphene diaphragm; Fabry-Perot nanomechanical resonator; air damping; pressure sensitivity; room temperature
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MDPI and ACS Style

Li, C.; Lan, T.; Yu, X.; Bo, N.; Dong, J.; Fan, S. Room-Temperature Pressure-Induced Optically-Actuated Fabry-Perot Nanomechanical Resonator with Multilayer Graphene Diaphragm in Air. Nanomaterials 2017, 7, 366.

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