MRAM: A Versatile Non-Volatile Memory for Next-Generation Computing
Abstract
1. Introduction
2. Fundamentals and Evolution of MRAM
2.1. Fundamentals of MRAM

2.2. Evolution of MRAM
2.3. Performance Comparison
2.4. Fabrication Process of SOT-MRAM
- ①
- Dielectric deposition: After the conventional CMOS process is completed, a dielectric material (SiO2, SiNx) with an appropriate density and thickness is deposited on the Si substrate, where the CMOS transistors (including front-end-of-line (FEOL) devices) and BEOL metal interconnects have already been fabricated, thereby forming a dielectric layer to support the subsequent MTJ devices.
- ②
- Bottom electrode via and CMP: Bottom electrode via structures are formed by etching, enabling electrical connection between the bottom electrode and the underlying BEOL metal layer; metal is deposited to fill the vias and form the bottom electrode; then, chemical mechanical polishing (CMP) is performed to reduce the surface roughness (ideally below 0.2 nm), providing a flat and high-quality surface for the growth of the SOT-MTJ device, which is essential for ensuring the performance of SOT-MRAM.
- ③
- MTJ deposition and annealing: Since the SOT layer serves as the path for the write current to generate spin current that drives the magnetization switching of the free layer, SOT-MRAM adopts a top-pinned configuration, in which the pinned layer and reference layer are located near the top electrode, while the free layer is positioned adjacent to the SOT layer. The basic functional layer structure is illustrated in Figure 3③. A multilayer stack including the SOT layer, MTJ layers, and capping layer is deposited by magnetron sputtering. After stack deposition, vacuum annealing is usually performed under a magnetic field for better TMR values. During this step, current-in-plane tunneling (CIPT) measurement is required to monitor key properties of the film stack, such as the TMR ratio and RA.
- ④
- Hard mask pattern: A dielectric layer, normally SiO2, SiNx, or SiC, is deposited to serve as the hard mask later on. Then, photolithography is performed to define the hard mask pattern, then the hard mask layer is etched, followed by complete removal of the photoresist.
- ⑤
- MTJ nanopillar etching: The MTJ multilayer stack is etched and the hard mask is partially (the remaining part will be removed later on) or fully consumed during the etching. The etching process must be precisely stopped above the SOT channel layer, while ensuring that the free layer is completely etched.
- ⑥
- Sidewall dielectric deposition: An in situ sidewall dielectric layer is deposited to prevent moisture, oxygen, and other contaminants from degrading the MTJ layers.
- ⑦
- SOT layer pattern: Photolithography is performed to define the SOT channel pattern, and then to etch the SOT layer.
- ⑧
- Interlayer dielectric deposition and CMP: A dielectric layer is deposited to fill the gaps and isolate the MTJs, then CMP is first performed to planarize the surface.
- ⑨
- Top electrode pattern and deposition: An interlayer dielectric layer is deposited, photolithography is performed to define the top electrode via pattern above the MTJ; the dielectric layer is etched to form the top electrode via structure; then the top-electrode metal is deposited. Finally, the SOT-MRAM is ready, and the write current path is indicated by white arrows, whereas the read path is indicated by yellow arrows. Depending on the interconnection requirements, more than one metal layer may be formed after the MTJ. In addition, to meet the functional requirements of chip packaging, wire-bonding pads and a passivation layer need to be formed at the topmost level.
3. Applications of MRAM
3.1. Embedded MRAM
3.2. MRAM in Caches and Main Memory
3.2.1. L2/L3 Cache Substitution
3.2.2. From Main Memory Integration to Near-Memory Storage
3.2.3. MRAM-Based Near-Memory Computing
3.3. MRAM in Artificial Intelligence
3.4. MRAM for Edge Computing and Wearables
3.5. MRAM in High-Reliability Domains
3.6. MRAM in Security Applications
4. Challenges
4.1. The Inherent Trade-Offs in Write Performance
4.2. Process Compatibility and Integration Complexity
4.3. Cost, Yield, and Commercialization Challenges
4.4. Physical and Architectural Limits to Density Scaling
5. Future Directions and Opportunities
5.1. Exploration of New Material
5.2. Novel Device Architectures
5.3. Integration with AI Hardware
5.4. In-Memory Computing
5.5. Hybrid Architectures
5.6. Commercialization Landscape and Ecosystem Growth
6. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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| Year | Manufacturer | Write Mechanism | Process | Capacity | Speed | Voltage/Current/Energy |
|---|---|---|---|---|---|---|
| 2005 | Sony [53] | STT-MRAM | 180 nm | 4 kbit | W ≈ 2 ns | W ≈ 200 μA |
| 2006 | Freescale [54] | Toggle-MRAM | 180 nm | 4 Mbit | W ≈ 35 ns | I ≈ 5–10 mA |
| 2008 | MagIC [55] | STT-MRAM | 130 nm | 64 kbit | W ≈ 20 ns | I ≈ 1 mA |
| 2009 | NEC [56] | STT-MRAM | 90 nm | 32 Mbit | W/R ≈ 12 ns | R ≈ 57 mW; W ≈ 70 mW |
| 2010 | Tohoku Univ./Fujitsu [57] | STT-MRAM | 130 nm | 16 kbit | R ≈ 9 ns; W ≈ 9–10 ns | I ≈ 0.4–0.87 mA |
| 2010 | Toshiba [58] | STT-MRAM | 65 nm | 64 Mbit | R/W ≈ 30 ns | I ≈ 10 μA |
| 2010 | Grandis [59] | STT-MRAM | 54 nm | 64 Mbit | R ≈ 20 ns | I ≈ 140 μA |
| 2010 | Hitachi [60] | STT-MRAM | 150 nm | 32 Mbit | R ≈ 32 ns; W ≈ 40 ns | I ≈ 300 μA |
| 2010 | IBM [61] | STT-MRAM | — | 4 kbit | W ≈ 50 ns | — |
| 2011 | Qualcomm [62] | STT-MRAM | 45 nm | 1 Mbit | R ≈ 8 ns | VDD ≈ 1.8 V |
| 2012 | Everspin [63] | STT-MRAM | 90 nm | 64 Mbit | W ≈ 50 ns | VDD ≈ 1.5 V |
| 2013 | TSMC [64] | STT-MRAM | 40 nm | 1 Mbit | R ≈ 10 ns | I ≈ 281–283 μA |
| 2013 | NEC/Tohoku Univ. [65] | STT-MRAM | 90 nm | 1 Mbit | R ≈ 1.5 ns; W ≈ 2.1 ns | VDD ≈ 1.3 V |
| 2013 | IBM/TDK [66] | STT-MRAM | 90 nm | 8 Mbit | W ≈ 1.5 ns | — |
| 2013 | Toshiba [67] | STT-MRAM | 65 nm | 512 kbit | W/R ≈ 8 ns | R ≈ 4 mW; W ≈ 15 mW |
| 2013 | Toshiba [68] | STT-MRAM | 65 nm | 1 Mbit | W/R ≈ 4 ns | R ≈ 17.8 mW; W ≈ 46.5 mW |
| 2014 | TDK [69] | STT-MRAM | 90 nm | 8 Mbit | R ≈ 4 ns; W ≈ 4.5 ns | — |
| 2015 | IBM/TDK [70] | STT-MRAM | 90 nm | 8 Mbit | R/W < 70 ns | R < 100 mV; W ≈ 600 mV |
| 2015 | Toshiba [71] | STT-MRAM | 65 nm | 1 Mbit | R ≈ 3.3 ns; W ≈ 3 ns | R ≈ 71.2 μJ/MHz; W ≈ 166.2 μJ/MHz |
| 2016 | Toshiba/Tohoku Univ. [72] | STT-MRAM | 65 nm | 4 Mbit | R ≈ 3.3 ns | VDD ≈ 1.25 V |
| 2016 | Everspin/GF [33] | STT-MRAM | 40 nm | 256 Mbit | W ≈ 50 ns | — |
| 2017 | Samsung [73] | STT-MRAM | 28 nm | 8 Mbit | R ≈ 10 ns | — |
| 2018 | TSMC [74] | STT-MRAM | 28 nm | 1 Mbit | R ≈ 2.8 ns; W ≈ 20 ns | VDD ≈ 1.2 V |
| 2019 | Everspin [75] | STT-MRAM | 28 nm | 1 Gbit | — | — |
| 2019 | Samsung [34] | STT-MRAM | 28 nm | 1 Gbit | — | — |
| 2019 | Intel [76] | STT-MRAM | 55 nm | 16 Mbit | R ≈ 4 ns; W ≈ 20 ns | — |
| 2020 | IBM [77] | STT-MRAM | 40 nm | 32 Mbit | W ≈ 3 ns | — |
| 2020 | Samsung/ARM [78] | STT-MRAM | 28 nm | 128 Mbit | R ≈ 33 ns | R ≈ 1.2 pJ/bit |
| 2022 | Samsung [35] | STT-MRAM | 14 nm | 16 Mbit | — | W ≈ 25 pJ/bit |
| 2022 | Everspin [36] | STT-MRAM | — | 8–64 Mbit | — | — |
| 2023 | Beihang Univ. [51] | SOT-MRAM | — | 1 Kbit | W ≈ 20 ns | WER down to |
| 2024 | Renesas [79] | STT-MRAM | 22 nm | 10.8 Mbit | >200 MHz random-read frequency (~4.2 ns class) | Write throughput 10.4 MB/s |
| 2025 | NYCU/TSMC/ITRI [52] | SOT-MRAM | — | 64 Kbit | Switching 1 ns | TMR 146%; retention > 10 years |
| Feature/ Metric | SOT-MRAM | STT-MRAM | Toggle-MRAM | 3D NAND Flash | eFlash | DRAM | SRAM |
|---|---|---|---|---|---|---|---|
| Write Mechanism | Spin–orbit torque (current-induced spin Hall effect) | Spin-transfer torque (current-induced magnetization switching) | Magnetic-field-induced toggle switching | Charge storage in charge-trap | Hot-electron injection/tunneling | Charge storage in capacitor | Bistable latch circuit |
| Write Speed | 0.3–2 ns | 5–50 ns | 20–100 ns | 100 µs–1 ms | 1–10 µs | 10–50 ns | <1 ns |
| Read Speed | <5 ns | 5–20 ns | 20–50 ns | 50–100 µs | 50–200 ns | 10–30 ns | <1 ns |
| Write Power Consumption | Very low (sub-pJ/bit) | Low (pJ/bit) | High (nJ/bit) | High | Moderate | Moderate | High |
| Endurance (Write Cycles) | >1015 | 1010–1015 | >1015 | 1013–1015 | 104–106 | - | - |
| Integration Density | High | Moderate–High | Low | Very High | Moderate | High | Low |
| Non-volatility | √ | √ | √ | √ | √ | × | × |
| CMOS Compatibility | Excellent | Excellent | Good | Limited | Limited | Excellent | Excellent |
| Operating Voltage | 0.6–1.2 V | 0.8–1.2 V | 1.5–3.3 V | 3–5 V | 1.8–3.3 V | 1.0–1.2 V | 1.0–1.2 V |
| Reference | [19,33,79] | [19,33,79] | [1,33,53,79,80] | [81] | [82] | [83,84] | [83,84] |
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Wang, Z.; Li, H.; Jiang, S. MRAM: A Versatile Non-Volatile Memory for Next-Generation Computing. Nanomaterials 2026, 16, 816. https://doi.org/10.3390/nano16130816
Wang Z, Li H, Jiang S. MRAM: A Versatile Non-Volatile Memory for Next-Generation Computing. Nanomaterials. 2026; 16(13):816. https://doi.org/10.3390/nano16130816
Chicago/Turabian StyleWang, Zhihan, Haiwen Li, and Sheng Jiang. 2026. "MRAM: A Versatile Non-Volatile Memory for Next-Generation Computing" Nanomaterials 16, no. 13: 816. https://doi.org/10.3390/nano16130816
APA StyleWang, Z., Li, H., & Jiang, S. (2026). MRAM: A Versatile Non-Volatile Memory for Next-Generation Computing. Nanomaterials, 16(13), 816. https://doi.org/10.3390/nano16130816

