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Volume 14
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10.3390/nano14221797
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Article

Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips

by
Xi Yang
1,*,
Liguo Wang
2,
Victor Smaluk
1,
Timur Shaftan
1,
Tianyi Wang
1,
Nathalie Bouet
1,
Gabriele D’Amen
3,
Weishi Wan
4 and
Pietro Musumeci
5
1
National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
2
Laboratory for BioMolecular Structure, Brookhaven National Laboratory, Upton, NY 11973, USA
3
Physics, Brookhaven National Laboratory, Upton, NY 11973, USA
4
School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
5
Department of Physics and Astronomy, University of California, Los Angeles (UCLA), Los Angeles, CA 90095, USA
*
Author to whom correspondence should be addressed.
Nanomaterials 2024, 14(22), 1797; https://doi.org/10.3390/nano14221797
Submission received: 12 September 2024 / Revised: 5 November 2024 / Accepted: 7 November 2024 / Published: 8 November 2024
(This article belongs to the Special Issue The Interaction of Electron Phenomena on the Mesoscopic Scale)
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Abstract

The resolution of a mega-electron-volt scanning transmission electron microscope (MeV-STEM) is primarily governed by the properties of the incident electron beam and angular broadening effects that occur within thick biological samples and microchips. A precise understanding and mitigation of these constraints require detailed knowledge of beam emittance, aberrations in the STEM column optics, and energy-dependent elastic and inelastic critical angles of the materials being examined. This simulation study proposes a standardized experimental framework for comprehensively assessing beam intensity, divergence, and size at the sample exit. This framework aims to characterize electron-sample interactions, reconcile discrepancies among analytical models, and validate Monte Carlo (MC) simulations for enhanced predictive accuracy. Our numerical findings demonstrate that precise measurements of these parameters, especially angular broadening, are not only feasible but also essential for optimizing imaging resolution in thick biological samples and microchips. By utilizing an electron source with minimal emittance and tailored beam characteristics, along with amorphous ice and silicon samples as biological proxies and microchip materials, this research seeks to optimize electron beam energy by focusing on parameters to improve the resolution in MeV-STEM/TEM. This optimization is particularly crucial for in situ imaging of thick biological samples and for examining microchip defects with nanometer resolutions. Our ultimate goal is to develop a comprehensive mapping of the minimum electron energy required to achieve a nanoscale resolution, taking into account variations in sample thickness, composition, and imaging mode.
Keywords: electron sample interaction; MeV-STEM/TEM; Monte Carlo simulation; angular broadening; biological sample; microchip; detector electron sample interaction; MeV-STEM/TEM; Monte Carlo simulation; angular broadening; biological sample; microchip; detector

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MDPI and ACS Style

Yang, X.; Wang, L.; Smaluk, V.; Shaftan, T.; Wang, T.; Bouet, N.; D’Amen, G.; Wan, W.; Musumeci, P. Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips. Nanomaterials 2024, 14, 1797. https://doi.org/10.3390/nano14221797

AMA Style

Yang X, Wang L, Smaluk V, Shaftan T, Wang T, Bouet N, D’Amen G, Wan W, Musumeci P. Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips. Nanomaterials. 2024; 14(22):1797. https://doi.org/10.3390/nano14221797

Chicago/Turabian Style

Yang, Xi, Liguo Wang, Victor Smaluk, Timur Shaftan, Tianyi Wang, Nathalie Bouet, Gabriele D’Amen, Weishi Wan, and Pietro Musumeci. 2024. "Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips" Nanomaterials 14, no. 22: 1797. https://doi.org/10.3390/nano14221797

APA Style

Yang, X., Wang, L., Smaluk, V., Shaftan, T., Wang, T., Bouet, N., D’Amen, G., Wan, W., & Musumeci, P. (2024). Simulation Study of High-Precision Characterization of MeV Electron Interactions for Advanced Nano-Imaging of Thick Biological Samples and Microchips. Nanomaterials, 14(22), 1797. https://doi.org/10.3390/nano14221797

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