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Journal: Nanomaterials, 2023
Volume: 13
Number: 274
274
Article: Vertical Etching of Scandium Aluminum Nitride Thin Films Using TMAH Solution
Authors: by A. S. M. Zadid Shifat, Isaac Stricklin, Ravi Kiran Chityala, Arjun Aryal, Giovanni Esteves, Aleem Siddiqui and Tito Busani
Link: https://www.mdpi.com/2079-4991/13/2/274

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