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10.3390/nano13192677
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Article

Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films

by
Tra Anh Khoa Nguyen
1,
Nhat Minh Dang
1,
Chi-Hang Lin
1,2,
Meng-Chieh Lee
3,
Zhao-Ying Wang
1,
Yao-Chuan Tsai
4 and
Ming-Tzer Lin
1,5,*
1
Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan
2
Aeronautical Systems Research Division, National Chung-Shan Institute of Science and Technology, Taichung 407, Taiwan
3
ASML Technology Taiwan Ltd., Hsinchu City 300, Taiwan
4
Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung City 402, Taiwan
5
Industrial and Smart Technology Program, Academy of Circular Economy, National Chung Hsing University, Nantou 540, Taiwan
*
Author to whom correspondence should be addressed.
Nanomaterials 2023, 13(19), 2677; https://doi.org/10.3390/nano13192677
Submission received: 31 August 2023 / Revised: 28 September 2023 / Accepted: 28 September 2023 / Published: 29 September 2023
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Abstract

Zirconium-based metallic glass films are promising materials for nanoelectronic and biomedical applications, but their mechanical behavior under different conditions is not well understood. This study investigates the effects of radio frequency (RF) power and test temperature on the nanostructure, morphology, and creep behavior of Zr55Cu30Al10Ni5 metallic glass films prepared by RF magnetron sputtering. The films were characterized by X-ray diffraction and microscopy, and their mechanical properties were measured by a bulge test system. The results show that the films were amorphous and exhibited a transition from noncolumnar to columnar morphology as the RF power increased from 75 W to 125 W. The columnar morphology reduced the creep resistance, Young’s modulus, residual stress, and hardness of the films. The creep behavior of the films was also influenced by the test temperature, with higher temperature leading to higher creep strain and lower creep stress. The findings of this study provide insights into the optimization of the sputtering parameters and the design of zirconium-based metallic glass films for various applications.
Keywords: metallic glass thin film; Zr-based metallic glass; amorphous structure; creep; residual stress metallic glass thin film; Zr-based metallic glass; amorphous structure; creep; residual stress

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MDPI and ACS Style

Nguyen, T.A.K.; Dang, N.M.; Lin, C.-H.; Lee, M.-C.; Wang, Z.-Y.; Tsai, Y.-C.; Lin, M.-T. Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films. Nanomaterials 2023, 13, 2677. https://doi.org/10.3390/nano13192677

AMA Style

Nguyen TAK, Dang NM, Lin C-H, Lee M-C, Wang Z-Y, Tsai Y-C, Lin M-T. Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films. Nanomaterials. 2023; 13(19):2677. https://doi.org/10.3390/nano13192677

Chicago/Turabian Style

Nguyen, Tra Anh Khoa, Nhat Minh Dang, Chi-Hang Lin, Meng-Chieh Lee, Zhao-Ying Wang, Yao-Chuan Tsai, and Ming-Tzer Lin. 2023. "Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films" Nanomaterials 13, no. 19: 2677. https://doi.org/10.3390/nano13192677

APA Style

Nguyen, T. A. K., Dang, N. M., Lin, C.-H., Lee, M.-C., Wang, Z.-Y., Tsai, Y.-C., & Lin, M.-T. (2023). Effects of RF Magnetron Sputtering Power on the Mechanical Behavior of Zr-Cu-Based Metallic Glass Thin Films. Nanomaterials, 13(19), 2677. https://doi.org/10.3390/nano13192677

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