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Article

Crystallization of Copper Films on Sapphire Substrate for Large-Area Single-Crystal Graphene Growth

1
Prokhorov General Physics Institute of the Russian Academy of Sciences, St. Vavilova 38, Moscow 119991, Russia
2
Department of Physical Metallurgy of Non-Ferrous Metals, National University of Science and Technology “MISiS”, Leninskiy Avenue 4, Moscow 119049, Russia
*
Author to whom correspondence should be addressed.
Nanomaterials 2023, 13(10), 1694; https://doi.org/10.3390/nano13101694
Submission received: 21 April 2023 / Revised: 12 May 2023 / Accepted: 15 May 2023 / Published: 22 May 2023

Abstract

Chemical vapor deposition synthesis of graphene on polycrystalline copper substrates from methane is a promising technique for industrial production and application. However, the quality of grown graphene can be improved by using single-crystal copper (111). In this paper, we propose to synthesize graphene on epitaxial single-crystal Cu film deposited and recrystallized on a basal-plane sapphire substrate. The effect of film thickness, temperature, and time of annealing on the size of copper grains and their orientation is demonstrated. Under optimized conditions, the copper grains with the (111) orientation and a record size of several millimeters are obtained, and the single-crystal graphene is grown over their entire area. The high quality of synthesized graphene has been confirmed by Raman spectroscopy, scanning electron microscopy, and the sheet resistance measurements by the four point probe method.
Keywords: copper thin films; copper crystallization; copper annealing; cvd synthesis; graphene monolayer; grain copper thin films; copper crystallization; copper annealing; cvd synthesis; graphene monolayer; grain

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MDPI and ACS Style

Komlenok, M.; Pivovarov, P.; Popovich, A.; Cheverikin, V.; Romshin, A.; Rybin, M.; Obraztsova, E. Crystallization of Copper Films on Sapphire Substrate for Large-Area Single-Crystal Graphene Growth. Nanomaterials 2023, 13, 1694. https://doi.org/10.3390/nano13101694

AMA Style

Komlenok M, Pivovarov P, Popovich A, Cheverikin V, Romshin A, Rybin M, Obraztsova E. Crystallization of Copper Films on Sapphire Substrate for Large-Area Single-Crystal Graphene Growth. Nanomaterials. 2023; 13(10):1694. https://doi.org/10.3390/nano13101694

Chicago/Turabian Style

Komlenok, Maxim, Pavel Pivovarov, Alexey Popovich, Vladimir Cheverikin, Alexey Romshin, Maxim Rybin, and Elena Obraztsova. 2023. "Crystallization of Copper Films on Sapphire Substrate for Large-Area Single-Crystal Graphene Growth" Nanomaterials 13, no. 10: 1694. https://doi.org/10.3390/nano13101694

APA Style

Komlenok, M., Pivovarov, P., Popovich, A., Cheverikin, V., Romshin, A., Rybin, M., & Obraztsova, E. (2023). Crystallization of Copper Films on Sapphire Substrate for Large-Area Single-Crystal Graphene Growth. Nanomaterials, 13(10), 1694. https://doi.org/10.3390/nano13101694

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