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Journal: Nanomaterials, 2022
Volume: 12
Number: 831

Article: Recent Advances in Theoretical Development of Thermal Atomic Layer Deposition: A Review
Authors: by Mina Shahmohammadi, Rajib Mukherjee, Cortino Sukotjo, Urmila M. Diwekar and Christos G. Takoudis
Link: https://www.mdpi.com/2079-4991/12/5/831

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