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Journal: NanomaterialsVolume: 12Number: 3608
Article: Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si
- Authors:
- Elena I. Suvorova1,*,
- Oleg V. Uvarov2 and
- Kirill V. Chizh2,3
- et al.
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