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Journal: Nanomaterials, 2022
Volume: 12
Number: 3608
Article:
Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si
Authors:
by
Elena I. Suvorova, Oleg V. Uvarov, Kirill V. Chizh, Alexey A. Klimenko and Philippe A. Buffat
Link:
https://www.mdpi.com/2079-4991/12/20/3608
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