Suvorova, E.I.; Uvarov, O.V.; Chizh, K.V.; Klimenko, A.A.; Buffat, P.A.
Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si. Nanomaterials 2022, 12, 3608.
https://doi.org/10.3390/nano12203608
AMA Style
Suvorova EI, Uvarov OV, Chizh KV, Klimenko AA, Buffat PA.
Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si. Nanomaterials. 2022; 12(20):3608.
https://doi.org/10.3390/nano12203608
Chicago/Turabian Style
Suvorova, Elena I., Oleg V. Uvarov, Kirill V. Chizh, Alexey A. Klimenko, and Philippe A. Buffat.
2022. "Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si" Nanomaterials 12, no. 20: 3608.
https://doi.org/10.3390/nano12203608
APA Style
Suvorova, E. I., Uvarov, O. V., Chizh, K. V., Klimenko, A. A., & Buffat, P. A.
(2022). Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si. Nanomaterials, 12(20), 3608.
https://doi.org/10.3390/nano12203608