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Journal: Nanomaterials, 2021
Volume: 11
Number: 2782

Article: Multilayer Reflective Coatings for BEUV Lithography: A Review
Authors: by Paul C. Uzoma, Salman Shabbir, Huan Hu, Paul C. Okonkwo and Oleksiy V. Penkov
Link: https://www.mdpi.com/2079-4991/11/11/2782

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