Next Article in Journal
Plasma for Energy and Catalytic Nanomaterials
Next Article in Special Issue
Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Previous Article in Journal
Preparation and Characterization of Self-Assembled Poly(l-Lactide) on the Surface of β-Tricalcium Diphosphate(V) for Bone Tissue Theranostics
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Nanomaterials
Volume 10
Issue 2
10.3390/nano10020332
nanomaterials-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Article

Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

by
Radim Skoupy
,
Tomas Fort
and
Vladislav Krzyzanek
*
Institute of Scientific Instruments of the Czech Academy of Sciences, Kralovopolska 147, CZ-61264 Brno, Czech Republic
*
Author to whom correspondence should be addressed.
Nanomaterials 2020, 10(2), 332; https://doi.org/10.3390/nano10020332
Submission received: 7 January 2020 / Revised: 27 January 2020 / Accepted: 12 February 2020 / Published: 15 February 2020
(This article belongs to the Special Issue Characterization of Nanomaterials)
Browse Figures
Versions Notes

Abstract

The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples.
Keywords: SEM; quantitative imaging; back-scattered electrons; standardless calibration; electron mirror; sample bias; Monte Carlo simulation; thin coating layers SEM; quantitative imaging; back-scattered electrons; standardless calibration; electron mirror; sample bias; Monte Carlo simulation; thin coating layers
Graphical Abstract

Share and Cite

MDPI and ACS Style

Skoupy, R.; Fort, T.; Krzyzanek, V. Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration. Nanomaterials 2020, 10, 332. https://doi.org/10.3390/nano10020332

AMA Style

Skoupy R, Fort T, Krzyzanek V. Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration. Nanomaterials. 2020; 10(2):332. https://doi.org/10.3390/nano10020332

Chicago/Turabian Style

Skoupy, Radim, Tomas Fort, and Vladislav Krzyzanek. 2020. "Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration" Nanomaterials 10, no. 2: 332. https://doi.org/10.3390/nano10020332

APA Style

Skoupy, R., Fort, T., & Krzyzanek, V. (2020). Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration. Nanomaterials, 10(2), 332. https://doi.org/10.3390/nano10020332

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop