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Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

Institute of Scientific Instruments of the Czech Academy of Sciences, Kralovopolska 147, CZ-61264 Brno, Czech Republic
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Nanomaterials 2020, 10(2), 332; https://doi.org/10.3390/nano10020332
Received: 7 January 2020 / Revised: 27 January 2020 / Accepted: 12 February 2020 / Published: 15 February 2020
(This article belongs to the Special Issue Characterization of Nanomaterials)
The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples. View Full-Text
Keywords: SEM; quantitative imaging; back-scattered electrons; standardless calibration; electron mirror; sample bias; Monte Carlo simulation; thin coating layers SEM; quantitative imaging; back-scattered electrons; standardless calibration; electron mirror; sample bias; Monte Carlo simulation; thin coating layers
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MDPI and ACS Style

Skoupy, R.; Fort, T.; Krzyzanek, V. Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration. Nanomaterials 2020, 10, 332.

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