A Comparative Study on the Effects of Passivation Methods on the Carrier Lifetime of RIE and MACE Silicon Micropillars
Abstract
:1. Introduction
2. Materials and Methods
3. Results
4. Discussion
5. Conclusions
Funding
Conflicts of Interest
References
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Planar | RIE | MACE | |
---|---|---|---|
Average Carrier Lifetime | 17.8 μs | 14.6 μs | 11.1 μs |
Image | |||
Histogram |
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Kabalan, A. A Comparative Study on the Effects of Passivation Methods on the Carrier Lifetime of RIE and MACE Silicon Micropillars. Appl. Sci. 2019, 9, 1804. https://doi.org/10.3390/app9091804
Kabalan A. A Comparative Study on the Effects of Passivation Methods on the Carrier Lifetime of RIE and MACE Silicon Micropillars. Applied Sciences. 2019; 9(9):1804. https://doi.org/10.3390/app9091804
Chicago/Turabian StyleKabalan, Amal. 2019. "A Comparative Study on the Effects of Passivation Methods on the Carrier Lifetime of RIE and MACE Silicon Micropillars" Applied Sciences 9, no. 9: 1804. https://doi.org/10.3390/app9091804