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Open AccessArticle

Large-Aperture Real-Time Compensated Collimating Wavefront Error Detection Method

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Shanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi’an Technological University, No. 2 Xuefu Middle Road, Xi’an 710021, China
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The Ningbo Branch of Ordnance Science Institute of China, Ningbo 310022, China
*
Author to whom correspondence should be addressed.
Appl. Sci. 2019, 9(11), 2370; https://doi.org/10.3390/app9112370
Received: 30 April 2019 / Revised: 30 May 2019 / Accepted: 4 June 2019 / Published: 11 June 2019
(This article belongs to the Section Applied Industrial Technologies)
This paper proposes a real-time compensated pentaprism scanning wavefront detection method to achieve real-time compensation for scanning errors occurring during prism movement along a guide rail. The method is based on existing pentaprism scanning wavefront detection technology and it is realized by applying self-collimation-based three-dimensional error compensation. Using theoretical and data analyses of a detection experiment, the reliability of the optimized pentaprism scanning detection method is verified, thus effectively ensuring the reasonable estimation of the interferometry surface measurement uncertainty. View Full-Text
Keywords: wavefront detection; pentaprism scanning; optical measurement wavefront detection; pentaprism scanning; optical measurement
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MDPI and ACS Style

Zhu, X.; Wang, D.; Nie, F.; Liu, B.; Wang, H.; Tian, A. Large-Aperture Real-Time Compensated Collimating Wavefront Error Detection Method. Appl. Sci. 2019, 9, 2370.

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