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Open AccessArticle

A High Precision Capacitive Linear Displacement Sensor with Time-Grating that Provides Absolute Positioning Capability Based on a Vernier-Type Structure

1
Engineering Research Center of Mechanical Testing Technology and Equipment (Ministry of Education), Chongqing University of Technology, Chongqing 400054, China
2
School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing 400054, China
*
Author to whom correspondence should be addressed.
Appl. Sci. 2018, 8(12), 2419; https://doi.org/10.3390/app8122419
Received: 31 October 2018 / Revised: 23 November 2018 / Accepted: 26 November 2018 / Published: 28 November 2018
(This article belongs to the Special Issue Precision Dimensional Measurements)
Nanometer-scale measurement devices with high accuracy and absolute long-range positioning capability are increasingly demanded in the field of computer numerical control machining. To meet this demand, the present report proposes a capacitive absolute linear displacement sensor with time-grating that employs a vernier-type structure based on a previously proposed single-row capacitive sensing structure. The novel proposed vernier-type absolute time-grating (VATG) sensor employs two capacitor rows, each with an equivalent measurement range. The first capacitor row is designed with n periods to realize fine measurement, while the second capacitor row is designed with n − 1 periods, and the phase difference between the second row and the first row is employed to obtain absolute positioning information. A prototype VATG sensor with a total measurement range of 600 mm and n = 150 is fabricated using printed circuit board manufacturing technology, and its measurement performance is evaluated experimentally. Harmonic analysis demonstrates that the measurement error mainly consists of first-harmonic error, which is mostly caused by signal crosstalk. Accordingly, an optimized prototype VATG sensor is fabricated by adding a shielding layer between the two capacitor rows and designing a differential induction structure. Experimental results demonstrate that the measurement error of the optimized prototype sensor is ±1.25 μm over the full 600 mm range and ±0.25 μm over a single 4 mm period. View Full-Text
Keywords: capacitive linear displacement sensor; vernier-type absolute structure; differential sensing structure; time-grating capacitive linear displacement sensor; vernier-type absolute structure; differential sensing structure; time-grating
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MDPI and ACS Style

Liu, X.; Zhang, H.; Peng, K.; Tang, Q.; Chen, Z. A High Precision Capacitive Linear Displacement Sensor with Time-Grating that Provides Absolute Positioning Capability Based on a Vernier-Type Structure. Appl. Sci. 2018, 8, 2419.

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