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Article

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

1
Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
2
College of Information Engineering, Qujing Normal University, Qujing 655000, China
3
Fraunhofer Institute for Electronic Nano Systems (ENAS), 09126 Chemnitz, Germany
*
Author to whom correspondence should be addressed.
Appl. Sci. 2018, 8(12), 2412; https://doi.org/10.3390/app8122412
Received: 5 November 2018 / Revised: 22 November 2018 / Accepted: 26 November 2018 / Published: 28 November 2018
(This article belongs to the Section Nanotechnology and Applied Nanosciences)
This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control. View Full-Text
Keywords: integrated angle sensor; electromagnetic; coupling effect; scanning micromirror; closed-loop control; flame retardant 4 (FR4) integrated angle sensor; electromagnetic; coupling effect; scanning micromirror; closed-loop control; flame retardant 4 (FR4)
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MDPI and ACS Style

Wen, Q.; Lei, H.; Yu, F.; Li, D.; She, Y.; Huang, J.; Huang, L.; Wen, Z. Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror. Appl. Sci. 2018, 8, 2412. https://doi.org/10.3390/app8122412

AMA Style

Wen Q, Lei H, Yu F, Li D, She Y, Huang J, Huang L, Wen Z. Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror. Applied Sciences. 2018; 8(12):2412. https://doi.org/10.3390/app8122412

Chicago/Turabian Style

Wen, Quan, Hongjie Lei, Fan Yu, Dongling Li, Yin She, Jian Huang, Liangkun Huang, and Zhiyu Wen. 2018. "Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror" Applied Sciences 8, no. 12: 2412. https://doi.org/10.3390/app8122412

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