Search Results (4)

This paper presents a novel temperature compensation approach for dual-axis Micro–Electro–Mechanical System (MEMS) accelerometers, integrating Adaptive Mode Decomposition (AMD) with Grey Wolf Optimization (GWO) and Hybrid Convolutional–Recurrent Temporal Network (HCR-TN). The proposed method aims to address temperature-induced bias drift, which significantly affects accelerometer performance. Experiments were conducted across a temperature range from −40 °C to +60 °C to evaluate the effectiveness of the compensation algorithm. The results show considerable improvements in bias stability, with the compensation method successfully reducing temperature-induced drift across both axes. Additionally, the algorithm was tested under realistic conditions, including noise and mechanical disturbances, demonstrating its robustness in practical applications. These findings highlight the potential of the proposed method for enhancing the reliability and accuracy of MEMS accelerometers in real-world sensing environments. Full article

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices. Full article

Disturbances presented in aeronautical imaging equipment can cause visual axis jitter, which directly leads to a reduction in closed-loop bandwidth and a decrease in tracking accuracy. The disturbance frequency affecting the stable control platform is mainly concentrated in the low- and middle-frequency bands, but the commonly used three closed-loop feedback control methods do not perform well in the disturbance rejection of those frequency bands. Moreover, the only disturbance observer in the acceleration loop cannot improve the low-band disturbance rejection capability due to the drift of the micro-electro-mechanical-system (MEMS) accelerometers in the low-frequency range. To solve these problems, this paper proposed dual disturbance observers (dual DOB) based on the disturbance information in the acceleration loop and the position loop. This design used two compensators to observe and compensate for the disturbances, which did not require additional sensors, and therefore did not increase system cost. Theoretical demonstrations and physical experiments showed that the designed method of the dual DOB not only improved the disturbance rejection capability of the low- and middle-frequency band of the optoelectronic stable control platform, but also improved the robustness of the system. Full article

With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high resolution, and high bandwidth. A commonly used accelerometer is the lead zirconate titanate (PZT) type; however, integrating it into intelligent modules is excessively expensive and difficult. Therefore, the micro electro mechanical systems (MEMS) accelerometer is an alternative with the advantages of lower price and superior integration. In the present study, we integrated two MEMS accelerometer chips into a low-pass filter and housing to develop a low-cost dual-axis accelerometer with a bandwidth of 5 kHz and a full scale range of ±50 g for measuring machine tool vibration. In addition, a platform for measuring the linearity, cross-axis sensitivity and frequency response of the MEMS accelerometer by using the back-to-back calibration method was also developed. Finally, cutting experiments with steady and chatter cutting were performed to verify the results of comparing the MEMS accelerometer with the PZT accelerometer in the time and frequency domains. The results demonstrated that the dual-axis MEMS accelerometer is suitable for monitoring the vibration of machine tools at low cost. Full article