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Journal: Appl. Sci., 2026
Volume: 16
Number: 8927
8927
Article: Accurate Structural Parameter Retrieval for One-Dimensional Nanogratings in Mueller-Matrix Spectroscopic Ellipsometry Using an Element-Adaptive Hybrid Surrogate Model
Authors: by Seri Kim, Leeju Hwang, Nagyeong Kim, Hyungbin Lee, Kibaek Kim and Young-Joo Kim
Link: https://www.mdpi.com/2076-3417/16/18/8927

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