Increasing the Accessibility of Causal Domain Knowledge via Causal Information Extraction Methods: A Case Study in the Semiconductor Manufacturing Industry
Abstract
:1. Introduction
- How effective are existing causal information extraction methods on different types of industrial documents?
- What is the effect of text representation learning on the overall performance of causal information extraction in industrial settings?
- Extending causal information extraction methods to industrial documents, increasing the availability of causal domain knowledge for downstream tasks in the industry.
- Providing guidance for practitioners working in different industries with similar types of documents. This guidance includes summarizing causal relation annotation guidelines in natural language, providing examples of these annotations from semiconductor manufacturing, and emphasizing the importance of inter-annotator agreements (IAA) to ensure annotation quality and clarity.
- Addressing data consistency issues commonly found in semi-structured documents, like the merged cells in FMEA documents.
- Contributing to the body of research that highlights the effect of representation learning on downstream tasks.
2. Related Work
2.1. Causal Information Extraction Applications
2.2. Causal Information Extraction Methods
- Efficient generalizability achieving broad applicability of the method with limited manual work, such as creating new knowledge bases for domain-specific patterns.
- The ability to acquire useful vectorized representations of the text that enables the training of different methods for causal information extraction.
- Having consistently and sufficiently annotated data sets with clear annotation guidelines that mitigate the different interpretations of causal information described in text.
- A representation that allows the system to manage the complexity associated with the description of causal relationships, such as nested or enchained causal relations.
3. Methods
- Text extraction from different document formats (the input extraction step in Figure 1): This step involves extracting a textual representation of the information contained in the different documents. This textual representation can be analyzed and used to develop causal information extraction methods. This step is elaborated in Section 3.1.
- Structured data representation (the Sentence annotation step in Figure 1): This step involves representing the information contained in texts extracted from different industrial documents in a structured format (i.e., a set of named entities and relations between these entities) that can be easily used for downstream tasks such as risk assessment, data analysis, etc. This step is outlined in Section 3.2.
- Automated causal information extraction from text (the Model training step in Figure 1): This step involves extracting a meaningful vectorized text representation, leveraging this representation to develop causal information extraction methods that transfer the information contained in the text to a set of named entities and relations between these entities. Namely, we propose two approaches: the first one based on SST, and the second one based on MST. This step is elaborated in Section 3.3.
3.1. Text Extraction from Different Document Formats
3.2. Structured Data Representation of Causal Information
- Causal relations are only annotated on text level, which corresponds to a single FMEA cell or a text box recognized by the OCR in the case of a presentation slides. Relations between entities that belong to different texts are disregarded.
- Two entities—either two effects or two causes—are annotated as a single entity if they are linked to the same cause or effect [30]. Example: Die chipping/crackEffect due toTrigger dicing process condition/parameters and the wafer condition in kerf areaCause.
- Causal relations can be chained [30]. The effect of a cause can be the cause of another effect. Example: Due toTriggera wrong implantation doseCause, the compensation was destroyedEffect Cause, and thereforeTrigger, the lot was disregardedEffect. In the example, the entity “the compensation was destroyed” is the effect of “a wrong implementation dose” and the cause of “the lot was disregarded”.
- Nested relations are allowed. There can be causal relations inside an entity (cause or effect). Example: Foreign material or residue does not cause failure at wafer testEffect due toTrigger thin isolation, inhibiting leakage currentCause. In the example, “thin isolation, inhibiting leakage current” is the cause of the first part of the sentence, but within this cause, there is another causal relation, since “Thin isolation” is the inhibitory cause of “leakage current”. In this case, we annotate the cause as well as the entities and the relations within the cause.
- Entities can be interrupted by other entities. Interrupted entities are annotated as one entity, excluding the part that belongs to another entity. Example: Due to a wrong implantation dose, the compensation was destroyedCause, and the lot wasEffect thusTrigger disregardedEffect.
- Entities are only annotated if there is a complete causal relation with a cause, an effect, and a trigger.
- Causal relations without an explicit trigger are disregarded [29].
- Lexical causatives are disregarded [28,29]. Example: Electrical and mechanical stress at application environment is cracking the isolation layer between defect and conductive line. Sentences with transitive verbs like “to crack” are not considered causal, even though one could argue that, in the example, the action of cracking is the cause for the crack. Such relations are disregarded since the entities and the trigger cannot be clearly separated.
- Hypothetical and assumed causal relations are annotated. Example: Scratches at Wafer BSEffect, most probably due toTrigger particlesCause.
- Future causal relations are considered. Example: Sentences like “X will lead to Y” are annotated.
- Relative pronouns are annotated as part of the cause or effect. Example: There is a QMP regarding edge damage whichCause could causeTrigger the flying diesEffect.
3.3. Automated Causal Information Extraction from Text
3.4. Evaluation Methodology
4. Experiments and Results
5. Discussion
Limitations and Opportunities
6. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
Abbreviations
Avg | Average |
FMEA | Failure Mode and Effects Analysis |
IAA | Inter-Annotator Agreement |
MST | Multi-Stage Sequence Tagging |
NER | Named Entity Recognition |
PMI | Point-Wise Mutual Information masking |
SST | Single-Stage Sequence Tagging |
UM | Uniform Masking |
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Annotation | Data Set | Micro Avg | Macro Avg | |||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
FMEA | Slides | FMEA and Slides | FMEA and Slides | |||||||||
Trigger | 94 | 94 | 8 | 93 | 93 | 3 | 94 | 94 | 5 | 94 | 94 | 6 |
Cause | 87 | 90 | 23 | 84 | 85 | 9 | 87 | 88 | 14 | 86 | 88 | 16 |
Effect | 86 | 88 | 16 | 67 | 68 | 6 | 81 | 83 | 10 | 76 | 78 | 11 |
Macro Avg | 89 | 91 | 16 | 81 | 82 | 6 | 87 | 88 | 10 | 85 | 86 | 11 |
Model | Annotation | Test Data Set | Micro Avg | Macro Avg | |||||
---|---|---|---|---|---|---|---|---|---|
FMEA | Slides | FMEA and Slides | FMEA and Slides | ||||||
SST | MST | SST | MST | SST | MST | SST | MST | ||
BERT | Trigger | 98 ± 1 | 98 ± 2 | 75 ± 4 | 81 ± 2 | 86 ± 2 | 89 ± 2 | 86 ± 2 | 90 ± 2 |
Cause | 88 ± 2 | 88 ± 4 | 61 ± 3 | 62 ± 6 | 74 ± 2 | 73 ± 5 | 74 ± 2 | 75 ± 5 | |
Effect | 74 ± 9 | 85 ± 6 | 61 ± 6 | 58 ± 2 | 67 ± 7 | 69 ± 3 | 68 ± 8 | 72 ± 4 | |
Macro Avg | 87 ± 4 | 90 ± 4 | 66 ± 4 | 67 ± 3 | 76 ± 4 | 77 ± 3 | 76 ± 4 | 79 ± 4 | |
Trigger Grouping | - | 96 ± 3 | - | 97 ± 4 | - | 96 ± 4 | - | 96 ± 4 | |
BERT UM | Trigger | 99 ± 1 | 98 ± 1 | 81 ± 4 | 81 ± 3 | 89 ± 2 | 89 ± 1 | 90 ± 2 | 90 ± 2 |
Cause | 92 ± 5 | 87 ± 7 | 63 ± 6 | 57 ± 6 | 76 ± 4 | 71 ± 4 | 78 ± 6 | 72 ± 6 | |
Effect | 90 ± 4 | 89 ± 3 | 67 ± 6 | 57 ± 4 | 76 ± 4 | 70 ± 2 | 78 ± 5 | 73 ± 4 | |
Macro Avg | 94 ± 3 | 91 ± 4 | 70 ± 5 | 65 ± 4 | 80 ± 3 | 77 ± 2 | 82 ± 4 | 78 ± 4 | |
Trigger Grouping | - | 98 ± 3 | - | 100 ± 0 | - | 99 ± 1 | - | 99 ± 2 | |
BERT PMI | Trigger | 99 ± 1 | 99 ± 1 | 79 ± 3 | 82 ± 4 | 89 ± 2 | 90 ± 2 | 89 ± 2 | 90 ± 2 |
Cause | 89 ± 5 | 90 ± 3 | 65 ± 3 | 64 ± 6 | 76 ± 3 | 75 ± 4 | 77 ± 4 | 77 ± 4 | |
Effect | 88 ± 7 | 91 ± 5 | 71 ± 4 | 59 ± 2 | 78 ± 5 | 73 ± 2 | 80 ± 6 | 75 ± 4 | |
Macro Avg | 92 ± 4 | 93 ± 3 | 72 ± 3 | 68 ± 4 | 81 ± 3 | 79 ± 3 | 82 ± 4 | 81 ± 3 | |
Trigger Grouping | - | 98 ± 1 | - | 100 ± 1 | - | 99 ± 0 | - | 99 ± 1 | |
MatBERT | Trigger | 97 ± 2 | 98 ± 1 | 76 ± 3 | 80 ± 4 | 86 ± 2 | 89 ± 2 | 86 ± 2 | 89 ± 2 |
Cause | 87 ± 3 | 89 ± 2 | 64 ± 17 | 66 ± 7 | 75 ± 8 | 75 ± 3 | 76 ± 10 | 78 ± 5 | |
Effect | 82 ± 8 | 93 ± 4 | 60 ± 10 | 64 ± 5 | 71 ± 9 | 79 ± 2 | 71 ± 9 | 78 ± 4 | |
Macro Avg | 89 ± 4 | 93 ± 2 | 67 ± 10 | 70 ± 5 | 77 ± 6 | 81 ± 2 | 78 ± 7 | 82 ± 4 | |
Trigger Grouping | - | 95 ± 4 | - | 98 ± 3 | - | 96 ± 2 | - | 96 ± 4 | |
MatBERT UM | Trigger | 97 ± 2 | 97 ± 1 | 78 ± 4 | 81 ± 4 | 87 ± 3 | 88 ± 2 | 88 ± 3 | 89 ± 2 |
Cause | 88 ± 4 | 86 ± 8 | 66 ± 11 | 69 ± 6 | 76 ± 5 | 76 ± 3 | 77 ± 8 | 77 ± 7 | |
Effect | 84 ± 9 | 89 ± 4 | 69 ± 6 | 63 ± 8 | 77 ± 6 | 75 ± 3 | 76 ± 6 | 76 ± 6 | |
Macro Avg | 90 ± 4 | 91 ± 4 | 71 ± 7 | 71 ± 6 | 80 ± 5 | 80 ± 3 | 80 ± 6 | 81 ± 5 | |
Trigger Grouping | - | 96 ± 2 | - | 98 ± 2 | - | 97 ± 2 | - | 97 ± 2 | |
MatBERT PMI | Trigger | 96 ± 1 | 98 ± 1 | 76 ± 5 | 82 ± 4 | 86 ± 3 | 90 ± 2 | 86 ± 3 | 90 ± 2 |
Cause | 83 ± 8 | 88 ± 4 | 67 ± 7 | 65 ± 4 | 74 ± 1 | 75 ± 3 | 75 ± 8 | 76 ± 4 | |
Effect | 86 ± 10 | 94 ± 3 | 65 ± 10 | 72 ± 6 | 76 ± 10 | 82 ± 4 | 76 ± 10 | 83 ± 4 | |
Macro Avg | 88 ± 6 | 93 ± 3 | 69 ± 7 | 73 ± 5 | 79 ± 5 | 82 ± 3 | 79 ± 7 | 83 ± 3 | |
Trigger Grouping | - | 93 ± 4 | - | 98 ± 2 | - | 96 ± 2 | - | 96 ± 3 |
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Razouk, H.; Benischke, L.; Gärber, D.; Kern, R. Increasing the Accessibility of Causal Domain Knowledge via Causal Information Extraction Methods: A Case Study in the Semiconductor Manufacturing Industry. Appl. Sci. 2025, 15, 2573. https://doi.org/10.3390/app15052573
Razouk H, Benischke L, Gärber D, Kern R. Increasing the Accessibility of Causal Domain Knowledge via Causal Information Extraction Methods: A Case Study in the Semiconductor Manufacturing Industry. Applied Sciences. 2025; 15(5):2573. https://doi.org/10.3390/app15052573
Chicago/Turabian StyleRazouk, Houssam, Leonie Benischke, Daniel Gärber, and Roman Kern. 2025. "Increasing the Accessibility of Causal Domain Knowledge via Causal Information Extraction Methods: A Case Study in the Semiconductor Manufacturing Industry" Applied Sciences 15, no. 5: 2573. https://doi.org/10.3390/app15052573
APA StyleRazouk, H., Benischke, L., Gärber, D., & Kern, R. (2025). Increasing the Accessibility of Causal Domain Knowledge via Causal Information Extraction Methods: A Case Study in the Semiconductor Manufacturing Industry. Applied Sciences, 15(5), 2573. https://doi.org/10.3390/app15052573